Preparation and structure of lead magnesium niobate titanate film by double-pulse excitation using Nd:YAG and KrF excimer lasers

Kazuo Shinozaki, Masayasu Kasahara, Takanori Kiguchi, Nobuyasu Mizutani, Naoki Wakiya

Research output: Contribution to journalArticlepeer-review

5 Citations (Scopus)

Abstract

We report the preparation of lead magnesium niobate titanate films on a buffered silicon substrate using pulsed laser deposition with double-pulse excitation. A Nd: YAG (355 nm) laser and a KrF (248 nm) excimer laser were combined. The film morphology changed drastically concomitant with the delay time. Suppression of droplets was observed when the Nd:YAG (9.0 × 10 1 J.Cm-2) was used as the first laser and KrF (5.0 × 10-2 J.cm-2) was used as the second laser with a 0.5 μs time delay. The fluence of the second laser was responsible for the resultant phase and when the fluence of KrF is 9.5 ×10-1 J.cm-2, a significant amount of pyrochlore type compounds coexisted.

Original languageEnglish
Pages (from-to)657-659
Number of pages3
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume46
Issue number2
DOIs
Publication statusPublished - 2007 Feb 8
Externally publishedYes

Keywords

  • Double-pulse excitation
  • KrF laser
  • Microstructure
  • Nd:YAG laser
  • PLD

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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