Preparation and optical properties of epitaxial Pb(Mg1/3Nb 2/3)O3 - PbTiO3 thin film on Si substrates with buffer layer using pulsed laser deposition

Naru Nemoto, Naoki Wakiya, Kazuo Shinozaki, Takanori Kiguchi, Keisuke Satou, Masatoshi Ishii, Masao Kondo, Kazuaki Kurihara, Nobuyasu Mizutani

Research output: Contribution to journalArticlepeer-review

5 Citations (Scopus)

Abstract

Epitaxial Pb(Mg1/3Nb2/3)O3-PbTiO 3 (PMN-PT) thin films for electrooptic applications were fabricated on a Si substrate using buffer layers. The PMN-PT/SrRuO3/SrTiO 3/(La,Sr)CoO3/CeO2 /YSZ/Si hetrostructure was fabricated by pulsed laser deposition. A PMN-PT thin film with a thickness of 2μm was successfully deposited. The optical characteristics of PMN-PT epitaxial film were measured by prism coupling method. The morphology of the PMN-PT films was drastically improved by introducing a mask between the target and substrate during the deposition. The PMN-PT thin film showed a columnar structure, where the width of each column was approximately 180nm. A refractive index of 2.48 with zero bias voltage was obtained for the epitaxial PMN-PT thin film using the prism coupler method.

Original languageEnglish
Pages (from-to)265-268
Number of pages4
JournalKey Engineering Materials
Volume301
DOIs
Publication statusPublished - 2006 Jan 1
Externally publishedYes

Keywords

  • Buffer Layer
  • Epitaxial
  • Optical properties
  • PLD
  • PMN-PT
  • Thin Film

ASJC Scopus subject areas

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

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