Low-temperature growth of YBa2Cu3Ox superconducting films by chemical vapor deposition (CVD) has been investigated using dipivaloylmetanato (DPM) chelates of Y, Ba and Cu as starting materials and N2O as an oxidizing agent. YBa2Cu3Ox structure has been prepared at a substrate temperature (Tsub) of 530°C. Superconducting films with superconductive critical temperature (Tc.onset) of 87 K and zero-resistivity critical temperature (Tc.zero) of 15 K have been obtained at Tsub = 610°C and Tc.onset = 89 K, Tc.zero = 83 K at Tsub = 650°C. The relationship between surface morphology, chemical composition and superconductivity is discussed.
|Number of pages||5|
|Journal||Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers|
|Issue number||12 A|
|Publication status||Published - 1992 Dec|
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)