Preparation and characterization of YBaCuO superconducting films by low-temperature chemical vapor deposition using β-diketonate complex and N2O

Hideaki Zama, Takavuki Miyake, Takeo Hattori, Shunri Oda

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    10 Citations (Scopus)

    Abstract

    Low-temperature growth of YBa2Cu3Ox superconducting films by chemical vapor deposition (CVD) has been investigated using dipivaloylmetanato (DPM) chelates of Y, Ba and Cu as starting materials and N2O as an oxidizing agent. YBa2Cu3Ox structure has been prepared at a substrate temperature (Tsub) of 530°C. Superconducting films with superconductive critical temperature (Tc.onset) of 87 K and zero-resistivity critical temperature (Tc.zero) of 15 K have been obtained at Tsub = 610°C and Tc.onset = 89 K, Tc.zero = 83 K at Tsub = 650°C. The relationship between surface morphology, chemical composition and superconductivity is discussed.

    Original languageEnglish
    Pages (from-to)3839-3843
    Number of pages5
    JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
    Volume31
    Issue number12 A
    Publication statusPublished - 1992 Dec

    ASJC Scopus subject areas

    • Physics and Astronomy (miscellaneous)

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