Preparation and characterization of lead zirconate titanate thin films derived by hybrid processing: Sol-Gel method and pulsed laser deposition

Zhan Jie Wang, Li Jun Yan, Yuki Aoki, Hiroyuki Kokawa, Ryutaro Maeda

Research output: Contribution to journalArticlepeer-review

5 Citations (Scopus)

Abstract

Pb(Zr0.52Ti0.48)O3 (PZT) thin films were prepared on Pt/Ti/SiO2/Si substrates by hybrid processing: sol-gel method and pulsed laser deposition. The temperature of postdeposition annealing in hybrid processing is 650°C, and is lower than that in the case of direct film deposition by pulsed laser deposition on a Pt/Ti/SiO2/Si substrate. The preferred orientation of the PZT films obtained by hybrid processing can be controlled using the seeding layer obtained by the sol-gel process. The TEM image showed that the PZT films have a polycrystalline columnar microstructure extending throughout the thickness of the film and no sharp interface was observed between the layers obtained by the sol-gel method and the pulsed laser deposition process. Electrical properties of the films were evaluated by measuring their P-E hysteresis loops and dielectric constants. The 1-μm-thick PZT films fabricated by hybrid processing consist of mainly the perovskite phase with a (111)-preferred orientation and have good ferroelectric properties. The ferroelectric parameters were remanent polarization Pr = 23.6 μC/cm2, and coercive field Ec = 54.8 kV/cm.

Original languageEnglish
Pages (from-to)5936-5940
Number of pages5
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume42
Issue number9 B
DOIs
Publication statusPublished - 2003 Sep

Keywords

  • Ferroelectric properties
  • Hybrid processing
  • Lead zirconate titanate (PZT)
  • Microstructure
  • Pulsed laser deposition
  • Sol-gel

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

Fingerprint Dive into the research topics of 'Preparation and characterization of lead zirconate titanate thin films derived by hybrid processing: Sol-Gel method and pulsed laser deposition'. Together they form a unique fingerprint.

Cite this