Abstract
Titanium diboride (TiB2) plates (about 1 mm maximum thickness) were prepared by chemical vapour deposition (CVD) using a TiCl4, B2H6 and H2 system at deposition temperatures, Tdep of 1323-1773 K. The B/Ti atomic ratio in the deposits was 2, and the composition is strictly stoichiometric. Chlorine was not detected. The measured lattice parameters were a=0.3029 nm and c=0.3229 nm. Density is in close agreement with the theoretical value (4.50 g cm-3). Preferred orientation of the CVD TiB2 plates varies mainly with total gas pressures, Ptot. At Ptot=4 kPa the (1 0 0) plane and at Ptot=40 kPa the (1 1 0) plane is preferably oriented parallel to the substrates. The effect of Ptot on the preferred orientation is discussed thermodynamically, and explained by supersaturation in the gas phase.
Original language | English |
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Pages (from-to) | 6613-6617 |
Number of pages | 5 |
Journal | Journal of Materials Science |
Volume | 26 |
Issue number | 24 |
DOIs | |
Publication status | Published - 1991 Dec 1 |
ASJC Scopus subject areas
- Materials Science(all)
- Mechanics of Materials
- Mechanical Engineering