Preferential immobilization of biomolecules on silicon microstructure array by means of electron beam lithography on organosilane self-assembled monolayer resist

Takashi Tanii, Takumi Hosaka, Takeo Miyake, Guo Jun Zhang, Tamotsu Zako, Takashi Funatsu, Iwao Ohdomari

    Research output: Contribution to journalConference articlepeer-review

    25 Citations (Scopus)

    Abstract

    A novel fabrication process of silicon microstructure array for preferential immobilization of biomolecules is proposed. We perform electron beam lithography on a self-assembled monolayer (SAM), and achieve high-density silicon patterns terminated with both 3-aminopropyltriethoxysilane (APTES) and octadecyltrimethoxysilane (ODS). The amino-terminated surface produces the site-directed covalent immobilization of DNA inside the pattern, while the hydrophobic surface of the ODS-SAM prevents the adsorption. As a result, we have succeeded in immobilizing the DNA within the amino-modified area. By using this methodology, we demonstrate the miniaturization of deoxyribonucleic acid (DNA) chip. After the covalent attachment of the amino-modified oligonucleotides to the microstructures, we hybridize the immobilized DNA with the target DNA labeled with a fluorescent dye. The signals from the DNA chip exhibit the specific binding due to the DNA-DNA interaction. These results show the feasibility of this technique for high-density information storage and biochip miniaturization.

    Original languageEnglish
    Pages (from-to)102-106
    Number of pages5
    JournalApplied Surface Science
    Volume234
    Issue number1-4
    DOIs
    Publication statusPublished - 2004 Jul 15
    EventThe Ninth International Conference on the Formation of Semicon - Madrid, Spain
    Duration: 2003 Sep 152003 Sep 19

    Keywords

    • Biochip
    • DNA
    • Deoxyribonucleic acid
    • EB
    • Immobilization
    • Lithography
    • SAM
    • Self-assembled monolayer

    ASJC Scopus subject areas

    • Chemistry(all)
    • Condensed Matter Physics
    • Physics and Astronomy(all)
    • Surfaces and Interfaces
    • Surfaces, Coatings and Films

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