Precision positioning of a surface motor-driven multi-axis stage using a surface encoder (2nd report) - Experiment of dynamic micro-positioning

Translated title of the contribution: Precision positioning of a surface motor-driven multi-axis stage using a surface encoder (2nd report) - Experiment of dynamic micro-positioning

Shuichi Dejima, Wei Gao, Hiroaki Yanai, Satoshi Kiyono

Research output: Contribution to journalArticlepeer-review

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Engineering & Materials Science