Precision positioning control of a Sawyer motor-based two-axis planar motion stage

Songyi Dian, Yoshikazu Arai, Wei Gao

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

A Sawyer motor-based planar motion stage has good open-loop positioning resolution, rapid acceleration and high speed. When operated in the open-loop mode, however, thrust ripple which mainly due to the cogging force at low moving speed, deteriorates the positioning performance. This paper describes the control strategy of a Sawyer motor-driven XY planar motion stage, in which an effective closed-loop control based on micro-stepping drive is designed. A scheme derived from Sliding Mode Observer (SMO) is used for cogging force compensation. The results of experiment have verified the effectiveness of suggested control strategies and tracking performance of the planar motion stage.

Original languageEnglish
Pages (from-to)253-271
Number of pages19
JournalInternational Journal of Surface Science and Engineering
Volume3
Issue number3
DOIs
Publication statusPublished - 2009

Keywords

  • Motion control
  • Precision positioning
  • SMO
  • Sawyer motor
  • Sliding-mode observer

ASJC Scopus subject areas

  • Mechanical Engineering
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

Fingerprint Dive into the research topics of 'Precision positioning control of a Sawyer motor-based two-axis planar motion stage'. Together they form a unique fingerprint.

  • Cite this