Precision optical displacement sensor based on ultra-thin film photodiode type optical interferometers

Yigui Li, Xiaoyu Mi, Minoru Sasaki, Kazihiro Hane

Research output: Contribution to journalArticlepeer-review

15 Citations (Scopus)

Abstract

The design and fabrication of our compact precision optical displacement sensor (PODS) are based on the newly developed ultra-thin film photodiode with its active layer thinner than a half of the incident light wavelength. In this paper, a detailed description of the principle, design, fabrication process and performance of PODS for application in both smooth and rough surfaces will be given.

Original languageEnglish
Pages (from-to)479-483
Number of pages5
JournalMeasurement Science and Technology
Volume14
Issue number4
DOIs
Publication statusPublished - 2003 Apr

Keywords

  • Laser interferometry
  • PODS
  • Ultra-thin film photodiode

ASJC Scopus subject areas

  • Instrumentation
  • Engineering (miscellaneous)
  • Applied Mathematics

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