Precision measurement of two-axis positions and tilt motions using a surface encoder

W. Gao, S. Dejima, Y. Shimizu, S. Kiyono

Research output: Contribution to journalArticle

52 Citations (Scopus)

Abstract

A prototype surface encoder consisting of a sinusoidal angle grid and a two-dimensional slope sensor is developed for two-axis position measurement. The angle grid has a three dimensional micro-structured surface, which is a superposition of periodic sinusoidal waves in the X- and Y-directions with spatial wavelengths of 150 μm and amplitudes of 100 nm over an area of up to 150 mm in diameter. The laser-based slope sensor is used to read local slope profiles of the grid surface. The X- and Y-positions together with tilt motions about the X-, Y- and Z-axes can be detected with resolutions of 0.1 μm and 1 arc-second through scanning a multi-spot laser beam across the grid surface at a constant speed.

Original languageEnglish
Pages (from-to)435-438
Number of pages4
JournalCIRP Annals - Manufacturing Technology
Volume52
Issue number1
DOIs
Publication statusPublished - 2003 Jan 1

Keywords

  • Metrology
  • Positioning
  • Sensor

ASJC Scopus subject areas

  • Mechanical Engineering
  • Industrial and Manufacturing Engineering

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