Precision measurement of cylinder surface profile on an ultra-precision machine tool

This paper describes the measurement of the surface straightness profile of a cylinder workpiece on an ultra-precision machine tool which has a T-base design with a spindle, an X-slide and a Z-slide. The movement range of the X-slide is 220 mm and that of the Z-slide is 150 mm, which have roller bearings in common. Two capacitive sensors are employed to scan a cylinder workpiece mounted on the spindle along the Z-axis. The straightness error motion of the Z-slide is measured to be approximately 100 nm by the reversal method. The straightness profile of the cylinder workpiece is evaluated to be approximately 400 nm by separation of the motion error, simultaneously.