Precision measurement and decoupled control of a planar motion stage

Song Yi Dian, I Ko, Katsutoshi Horie, Satoshi Kiyono

Research output: Contribution to journalArticlepeer-review

4 Citations (Scopus)

Abstract

This paper describes the measurement and decoupled control of a surface motor-driven XY planar motion stage. The surface motor is composed of four linear motors placed on the XY-plane in a rectangular shape. The magnetic array and the stator winding of the linear motor are mounted on the platen (the moving element) and the stage base, respectively. The platen can be moved in the X- and Y-directions and rotated about the Z-axis. The XY-positions and the theta-Z rotation of the platen are measured by a three-axis laser interferometer. A decoupled controlling element is employed to reduce the interference errors between the in-plane motions. A cascaded notch compensator is also applied for dealing with the stage resonance. In addition, an effective disturbance observer is implemented to estimate and eliminate the influence of disturbance forces. Experimental results indicate that the developed controller has good dynamic and tracking performances, especially the capability of reducing the interference errors between different drive axes.

Original languageEnglish
Pages (from-to)567-574
Number of pages8
JournalJournal of the Chinese Society of Mechanical Engineers, Transactions of the Chinese Institute of Engineers, Series C/Chung-Kuo Chi Hsueh Kung Ch'eng Hsuebo Pao
Volume27
Issue number5
Publication statusPublished - 2006 Oct 1

Keywords

  • Decoupled control
  • Interference error
  • Laser interferometer
  • Planar motion stage
  • Precision measurement

ASJC Scopus subject areas

  • Engineering(all)

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