Precision fabrication of a large-area sinusoidal surface using a fast-tool-servo technique - Improvement of local fabrication accuracy -

Wei Gao, Makoto Tano, Takeshi Araki, Satoshi Kiyono

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)

Abstract

This paper describes a diamond turning fabrication system for a sinusoidal grid surface. The wavelength and amplitude of the sinusoidal wave in each direction are 100μm and 100 nm, respectively. The fabrication system, which is based on a fast-tool-servo (FTS), has the ability to generate the angle grid surface over an area of 150 mm. This paper focuses on the improvement of the local fabrication accuracy. The areas considered are each approximately 1 × 1 mm, and can be imaged by an interference microscope. Specific fabrication errors of the manufacturing process, caused by the round nose geometry of the diamond cutting tool and the data digitization, are successfully identified by Discrete Fourier Transform of the microscope images. Compensation processes are carried out to reduce the errors. As a result, the fabrication errors in local areas of the angle grid surface are reduced by 1/10.

Original languageEnglish
Pages (from-to)1203-1208
Number of pages6
JournalJSME International Journal, Series C: Mechanical Systems, Machine Elements and Manufacturing
Volume49
Issue number4
DOIs
Publication statusPublished - 2007 Jun 15

Keywords

  • Accuracy
  • Fast-tool-servo
  • Measurement
  • Sinusoidal surface
  • Ultra-precision machining

ASJC Scopus subject areas

  • Mechanical Engineering
  • Industrial and Manufacturing Engineering

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