Precise wavelength control for DFB laser diodes by novel corrugation delineation method

Y. Muroya, T. Nakamura, H. Yamada, T. Torikai

Research output: Contribution to journalArticlepeer-review

45 Citations (Scopus)

Abstract

Precise wavelength control of a multiple-wavelength DFB laser-diode (LD) array was achieved using weighted-dose allocation variable-pitch EB-lithography (WAVE) and highly uniform MOVPE. Multiple-wavelength 1.3 μm λ/4-shifted DFB LD arrays with wavelength spacing of 2.0 nm were successfully demonstrated. The standard deviation of the wavelength was as low as 0.37 nm over 2-in wafers.

Original languageEnglish
Pages (from-to)288-290
Number of pages3
JournalIEEE Photonics Technology Letters
Volume9
Issue number3
DOIs
Publication statusPublished - 1997 Mar 1
Externally publishedYes

Keywords

  • Distributed feedback lasers
  • Electron beam lithography
  • Gratings
  • Semiconductor laser arrays
  • Wavelength division multiplexing

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Electrical and Electronic Engineering

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