Precise resistivity measurement of submicrometer-sized materials by using tem with microprobes

N. Kawamoto, Y. Murakami, D. Shindo, H. Azehara, H. Tokumoto

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

Precise electric resistivity measurements of submicrometer-sized materials have been demonstrated by using the piezodriving mechanics of two microprobes in a transmission electron microscope. By introducing two supplemental copper cables connected to a specimen, an electric circuit similar to that used in the four-terminal method was realized in a specimen holder with two microprobes. By using the proposed method, we determined the resistivity of a needle-shaped Pt-Ir specimen, whose resistance is only of the order of 0.10, with a satisfactory precision of <2 × 10-4 O. This method can be employed in microscopy studies on many submicrometer-sized and/or nanometer-sized materials.

Original languageEnglish
Pages (from-to)1572-1575
Number of pages4
JournalMaterials Transactions
Volume50
Issue number6
DOIs
Publication statusPublished - 2009 Jun 1

Keywords

  • Carbon nanotube
  • Conductivity measurement
  • Four-terminal method
  • Transmission electron microscopy

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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