Precise impurity analysis of Cu films by GDMS: Relation between negative substrate bias voltage and impurity ionization potentials

J. W. Lim, K. Mimura, M. Isshiki

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Precise impurity analysis of Cu films by GDMS: Relation between negative substrate bias voltage and impurity ionization potentials'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy

Chemical Compounds