Precise evaluation of Zero-CTE temperature of EUVL-grade TiO 2-SiO 2 ultra-low-expansion glass using the line-focus-beam ultrasonic material characterization system

Jun Ichi Kushibiki, Mototaka Arakawa

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

This paper presents a calibration line between leaky surface acoustic wave (LSAW) velocities (V LSAW) and coefficientof-thermal-expansion (CTE) characteristics for TiO 2-doped SiO 2 (TiO 2-SiO 2) glass to evaluate the absolute CTE by the line-focus-beam ultrasonic material characterization (LFB-UMC) system. Commercial TiO 2-SiO 2 ultra-low-expansion glass and synthetic silica glass were selected as specimens. We measured V LSAW by the LFB-UMC system and CTE characteristics by dilatometers, and obtained relationships among V LSAW, CTE at 22°C {CTE(22°C)} and zero-CTE temperature {T(zero-CTE)}. Resolutions of CTE(22°C) and T(zero-CTE) determined by the LSAW velocity measurement were estimated as ±0.72 (ppb/K) and ±0.14°C (±2σ, σ standard deviation) at 225 MHz. Both manufacturers and users can precisely inspect T(zero-CTE) for all EUVL-grade ultra-low-expansion glass substrates by this indirect evaluation method using the calibration line.

Original languageEnglish
Title of host publicationAlternative Lithographic Technologies
DOIs
Publication statusPublished - 2009 Jun 19
EventAlternative Lithographic Technologies - San Jose, CA, United States
Duration: 2009 Feb 242009 Feb 26

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume7271
ISSN (Print)0277-786X

Other

OtherAlternative Lithographic Technologies
CountryUnited States
CitySan Jose, CA
Period09/2/2409/2/26

Keywords

  • Absolute CTE
  • CTE evaluation
  • Calibration line
  • EUVL system
  • Leaky surface acoustic waves
  • Line-focus-beam ultrasonic material characterization system
  • TiO -SiO ultra-low-expansion glass
  • Velocity measurement

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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