Precise control of nitrogen profiles and nitrogen bond states for highly reliable N2O-grown oxynitride

Akinobu Teramoto, H. Umeda, H. Tamura, Y. Nishida, H. Sayama, K. Terada, K. Kawase, Y. Ohno, A. Shigetomi

Research output: Contribution to journalArticlepeer-review

13 Citations (Scopus)

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Chemical Compounds

Engineering & Materials Science