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Precise control of nitrogen profiles and nitrogen bond states for highly reliable N2O-grown oxynitride
Akinobu Teramoto, H. Umeda, H. Tamura, Y. Nishida, H. Sayama, K. Terada, K. Kawase, Y. Ohno, A. Shigetomi
Research output: Contribution to journal › Article › peer-review
13
Citations
(Scopus)