Precise automatic alignment of pinhole integrated with photodiode

Minoru Sasaki; Yuji Arai; Wataru Kamada; Kazuhiro Hane

doi:10.1117/12.311035

Precise automatic alignment of pinhole integrated with photodiode

Minoru Sasaki, Yuji Arai, Wataru Kamada, Kazuhiro Hane

ENG - Finemechanics

Research output: Contribution to journal › Conference article › peer-review

Abstract

The spatial filter of a Si micromachined pinhole integrated with photodiodes is fabricated. The photodiode cells placed around the center pinhole can detect the relative position between the incident beam spot and the pinhole. In our previous study, the automatic alignment of the pinhole realized the accuracy of 1 μm using the feedback control based on the obtained position signal. To increase the alignment accuracy, the suitable design of the pinhole and the photodiode cell is necessary, since it decides the sensitivity to the laser spot position. The sensitivity is examined changing the separation length between the photodiode cells.

Original language	English
Pages (from-to)	413-416
Number of pages	4
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	3419
DOIs	https://doi.org/10.1117/12.311035
Publication status	Published - 1998 Dec 1
Event	Optoelectronic Materials and Devices - Taipei, Taiwan, Province of China Duration: 1998 Jul 9 → 1998 Jul 11

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

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10.1117/12.311035

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@article{e9784ac5671b4455b34cfa307341c8f1,

title = "Precise automatic alignment of pinhole integrated with photodiode",

abstract = "The spatial filter of a Si micromachined pinhole integrated with photodiodes is fabricated. The photodiode cells placed around the center pinhole can detect the relative position between the incident beam spot and the pinhole. In our previous study, the automatic alignment of the pinhole realized the accuracy of 1 μm using the feedback control based on the obtained position signal. To increase the alignment accuracy, the suitable design of the pinhole and the photodiode cell is necessary, since it decides the sensitivity to the laser spot position. The sensitivity is examined changing the separation length between the photodiode cells.",

author = "Minoru Sasaki and Yuji Arai and Wataru Kamada and Kazuhiro Hane",

year = "1998",

month = dec,

day = "1",

doi = "10.1117/12.311035",

language = "English",

volume = "3419",

pages = "413--416",

journal = "Proceedings of SPIE - The International Society for Optical Engineering",

issn = "0277-786X",

publisher = "SPIE",

note = "Optoelectronic Materials and Devices ; Conference date: 09-07-1998 Through 11-07-1998",

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TY - JOUR

T1 - Precise automatic alignment of pinhole integrated with photodiode

AU - Sasaki, Minoru

AU - Arai, Yuji

AU - Kamada, Wataru

AU - Hane, Kazuhiro

PY - 1998/12/1

Y1 - 1998/12/1

N2 - The spatial filter of a Si micromachined pinhole integrated with photodiodes is fabricated. The photodiode cells placed around the center pinhole can detect the relative position between the incident beam spot and the pinhole. In our previous study, the automatic alignment of the pinhole realized the accuracy of 1 μm using the feedback control based on the obtained position signal. To increase the alignment accuracy, the suitable design of the pinhole and the photodiode cell is necessary, since it decides the sensitivity to the laser spot position. The sensitivity is examined changing the separation length between the photodiode cells.

AB - The spatial filter of a Si micromachined pinhole integrated with photodiodes is fabricated. The photodiode cells placed around the center pinhole can detect the relative position between the incident beam spot and the pinhole. In our previous study, the automatic alignment of the pinhole realized the accuracy of 1 μm using the feedback control based on the obtained position signal. To increase the alignment accuracy, the suitable design of the pinhole and the photodiode cell is necessary, since it decides the sensitivity to the laser spot position. The sensitivity is examined changing the separation length between the photodiode cells.

UR - http://www.scopus.com/inward/record.url?scp=0032402806&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0032402806&partnerID=8YFLogxK

U2 - 10.1117/12.311035

DO - 10.1117/12.311035

M3 - Conference article

AN - SCOPUS:0032402806

VL - 3419

SP - 413

EP - 416

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

SN - 0277-786X

T2 - Optoelectronic Materials and Devices

Y2 - 9 July 1998 through 11 July 1998

ER -

Precise automatic alignment of pinhole integrated with photodiode

Abstract

ASJC Scopus subject areas

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