Abstract
The spatial filter of a Si micromachined pinhole integrated with photodiodes is fabricated. The photodiode cells placed around the center pinhole can detect the relative position between the incident beam spot and the pinhole. In our previous study, the automatic alignment of the pinhole realized the accuracy of 1 μm using the feedback control based on the obtained position signal. To increase the alignment accuracy, the suitable design of the pinhole and the photodiode cell is necessary, since it decides the sensitivity to the laser spot position. The sensitivity is examined changing the separation length between the photodiode cells.
Original language | English |
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Pages (from-to) | 413-416 |
Number of pages | 4 |
Journal | Proceedings of SPIE - The International Society for Optical Engineering |
Volume | 3419 |
DOIs | |
Publication status | Published - 1998 Dec 1 |
Event | Optoelectronic Materials and Devices - Taipei, Taiwan, Province of China Duration: 1998 Jul 9 → 1998 Jul 11 |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Computer Science Applications
- Applied Mathematics
- Electrical and Electronic Engineering