Precipitation hardening in Ti-Mo-N coating deposited by reactive sputtering

Yuji Suto; Shoko Komiyama; Katsunari Oikawa; Daisuke Ando; Junichi Koike

Precipitation hardening in Ti-Mo-N coating deposited by reactive sputtering

Yuji Suto, Shoko Komiyama, Katsunari Oikawa, Daisuke Ando, Junichi Koike

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

The effect of heat treatment on the hardness of sputtered Ti-Mo-N film were investigated. We found that Ti₄₂Mo₁₁N₄₇ film showed little hardness change by heat treatment, while Ti₃₄Mo28N₃₈ film showed a drastic increase of hardness (28 GPa → 35 GPa) by heat treatment at around 1000°C. Such a hardness increase was caused by the precipitation of a bcc phase in a S-matrix.

Original language	English
Title of host publication	PTM 2015 - Proceedings of the International Conference on Solid-Solid Phase Transformations in Inorganic Materials 2015
Editors	Long-Qing Chen, Matthias Militzer, Gianluigi Botton, James Howe, Chadwick Sinclair, Hatem Zurob
Publisher	International Conference on Solid-Solid Phase Transformations in Inorganic Materials 2015
Pages	417-418
Number of pages	2
ISBN (Electronic)	9780692437360
Publication status	Published - 2015 Jan 1
Event	International Conference on Solid-Solid Phase Transformations in Inorganic Materials 2015, PTM 2015 - Whistler, Canada Duration: 2015 Jun 28 → 2015 Jul 3

Publication series

Name	PTM 2015 - Proceedings of the International Conference on Solid-Solid Phase Transformations in Inorganic Materials 2015

Other

Other	International Conference on Solid-Solid Phase Transformations in Inorganic Materials 2015, PTM 2015
Country	Canada
City	Whistler
Period	15/6/28 → 15/7/3

Keywords

Hardness
Heat-treatment
Nitride coating

ASJC Scopus subject areas

Chemical Engineering(all)
Inorganic Chemistry
Materials Chemistry
Metals and Alloys

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Suto, Y., Komiyama, S., Oikawa, K., Ando, D., & Koike, J. (2015). Precipitation hardening in Ti-Mo-N coating deposited by reactive sputtering. In L-Q. Chen, M. Militzer, G. Botton, J. Howe, C. Sinclair, & H. Zurob (Eds.), PTM 2015 - Proceedings of the International Conference on Solid-Solid Phase Transformations in Inorganic Materials 2015 (pp. 417-418). (PTM 2015 - Proceedings of the International Conference on Solid-Solid Phase Transformations in Inorganic Materials 2015). International Conference on Solid-Solid Phase Transformations in Inorganic Materials 2015.

Precipitation hardening in Ti-Mo-N coating deposited by reactive sputtering. / Suto, Yuji; Komiyama, Shoko; Oikawa, Katsunari ; Ando, Daisuke ; Koike, Junichi.

PTM 2015 - Proceedings of the International Conference on Solid-Solid Phase Transformations in Inorganic Materials 2015. ed. / Long-Qing Chen; Matthias Militzer; Gianluigi Botton; James Howe; Chadwick Sinclair; Hatem Zurob. International Conference on Solid-Solid Phase Transformations in Inorganic Materials 2015, 2015. p. 417-418 (PTM 2015 - Proceedings of the International Conference on Solid-Solid Phase Transformations in Inorganic Materials 2015).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Suto, Y, Komiyama, S, Oikawa, K , Ando, D & Koike, J 2015, Precipitation hardening in Ti-Mo-N coating deposited by reactive sputtering. in L-Q Chen, M Militzer, G Botton, J Howe, C Sinclair & H Zurob (eds), PTM 2015 - Proceedings of the International Conference on Solid-Solid Phase Transformations in Inorganic Materials 2015. PTM 2015 - Proceedings of the International Conference on Solid-Solid Phase Transformations in Inorganic Materials 2015, International Conference on Solid-Solid Phase Transformations in Inorganic Materials 2015, pp. 417-418, International Conference on Solid-Solid Phase Transformations in Inorganic Materials 2015, PTM 2015, Whistler, Canada, 15/6/28.

Suto Y, Komiyama S, Oikawa K , Ando D , Koike J. Precipitation hardening in Ti-Mo-N coating deposited by reactive sputtering. In Chen L-Q, Militzer M, Botton G, Howe J, Sinclair C, Zurob H, editors, PTM 2015 - Proceedings of the International Conference on Solid-Solid Phase Transformations in Inorganic Materials 2015. International Conference on Solid-Solid Phase Transformations in Inorganic Materials 2015. 2015. p. 417-418. (PTM 2015 - Proceedings of the International Conference on Solid-Solid Phase Transformations in Inorganic Materials 2015).

Suto, Yuji ; Komiyama, Shoko ; Oikawa, Katsunari ; Ando, Daisuke ; Koike, Junichi. / Precipitation hardening in Ti-Mo-N coating deposited by reactive sputtering. PTM 2015 - Proceedings of the International Conference on Solid-Solid Phase Transformations in Inorganic Materials 2015. editor / Long-Qing Chen ; Matthias Militzer ; Gianluigi Botton ; James Howe ; Chadwick Sinclair ; Hatem Zurob. International Conference on Solid-Solid Phase Transformations in Inorganic Materials 2015, 2015. pp. 417-418 (PTM 2015 - Proceedings of the International Conference on Solid-Solid Phase Transformations in Inorganic Materials 2015).

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title = "Precipitation hardening in Ti-Mo-N coating deposited by reactive sputtering",

abstract = "The effect of heat treatment on the hardness of sputtered Ti-Mo-N film were investigated. We found that Ti42Mo11N47 film showed little hardness change by heat treatment, while Ti34Mo28N38 film showed a drastic increase of hardness (28 GPa → 35 GPa) by heat treatment at around 1000°C. Such a hardness increase was caused by the precipitation of a bcc phase in a S-matrix.",

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AB - The effect of heat treatment on the hardness of sputtered Ti-Mo-N film were investigated. We found that Ti42Mo11N47 film showed little hardness change by heat treatment, while Ti34Mo28N38 film showed a drastic increase of hardness (28 GPa → 35 GPa) by heat treatment at around 1000°C. Such a hardness increase was caused by the precipitation of a bcc phase in a S-matrix.

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BT - PTM 2015 - Proceedings of the International Conference on Solid-Solid Phase Transformations in Inorganic Materials 2015

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Precipitation hardening in Ti-Mo-N coating deposited by reactive sputtering

Abstract

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Keywords

ASJC Scopus subject areas

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