We have fabricated precipitate-free La 0.7Sr 0.3MnO 3 (LSMO) films by locating precipitate nucleation at artificial step edges patterned on SrTiO 3 substrates and absorbing excess species of off-stoichiometry by getter effect. The precipitate-free and atomically flat area of about 10 μm width can be obtained along the step edges by pulsed-laser deposition at a substrate temperature T s of ∼900 °C. Thermally activated processes are shown to be involved in such chemical reactions between the precipitates and surface migrating species. LSMO/SrTiO 3/LSMO tunnel junctions fabricated by this method showed an excellent uniformity of the junction resistances.
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)