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PRACTICAL PHOTOMASK PINHOLE DEFECT REPAIR USING MICROMETER SCALE PATTERN CD CVD WITH KHZ REPETITION UV LIGHT PULSES.
Y. Morishige, H. Yokoyama, S. Kishida, K. Washio, H. Kinoshita, S. Nakamura, R. Tatsumi
Research output: Contribution to conference › Paper › peer-review