Potential of acoustic imaging in the detection of nanometer gaps

Hironori Tohmyoh, Masumi Saka, Hayato Hirayama

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)

Abstract

The potential of the water-immersion and dry-contact acoustic imaging techniques for detecting nanometer gaps embedded in silicon is studied. The sensitivity for detecting gaps of over 10 nm in height is governed only by the lateral resolution of the imaging and is independent of the height of the gap.

Original languageEnglish
Pages (from-to)2481-2483
Number of pages3
JournalIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
Volume53
Issue number12
DOIs
Publication statusPublished - 2006 Dec 1

ASJC Scopus subject areas

  • Instrumentation
  • Acoustics and Ultrasonics
  • Electrical and Electronic Engineering

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