Possibility for sub-ppm hydrogen detection with the ball SAW sensor

Hiroki Nagai, Shohei Kawai, Osamu Ito, Toru Oizmi, Toshihiro Tsuji, Nobuo Takeda, Kazushi Yamanaka

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

For efficient control of fuel cells, highly sensitive measurement of the concentration of hydrogen gas (H2) under high humidity is required. In this study, we fabricated the ball SAW sensor with sputtered Pt-coated Zno film as a sensitive film and evaluated the response to H2 of the concentration in the range of 200 ppm to 20 ppm. The thicknesses of ZnO and Pt films are 200 nm and 5 nm, respectively. The sensor succeeded in detecting 20 ppm H2 by the amplitude change of -0.79 dB. After the sensor was wetted by water, the response was measured again. As a result, 20 ppm H2 was detected by 0.4 dB. We calculated the detection limit (DL) defined as the concentration corresponding to the signal to noise ratio of 3. Since DLs before and after wetted was 0.47 ppm and 0.27 ppm, respectively, the sensitive film was not deteriorated by wetting. In conclusion, it was shown that the ball SAW sensor with Ptcoated ZnO film was useful for humidity-proof H2 sensor with sub-ppm DL.

Original languageEnglish
Title of host publication20th International Congress on Acoustics 2010, ICA 2010 - Incorporating Proceedings of the 2010 Annual Conference of the Australian Acoustical Society
Pages2810-2813
Number of pages4
Publication statusPublished - 2010 Dec 1
Event20th International Congress on Acoustics 2010, ICA 2010 - Incorporating the 2010 Annual Conference of the Australian Acoustical Society - Sydney, NSW, Australia
Duration: 2010 Aug 232010 Aug 27

Publication series

Name20th International Congress on Acoustics 2010, ICA 2010 - Incorporating Proceedings of the 2010 Annual Conference of the Australian Acoustical Society
Volume4

Other

Other20th International Congress on Acoustics 2010, ICA 2010 - Incorporating the 2010 Annual Conference of the Australian Acoustical Society
CountryAustralia
CitySydney, NSW
Period10/8/2310/8/27

ASJC Scopus subject areas

  • Acoustics and Ultrasonics

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