TY - GEN
T1 - Possibility for sub-ppm hydrogen detection with the ball SAW sensor
AU - Nagai, Hiroki
AU - Kawai, Shohei
AU - Ito, Osamu
AU - Oizmi, Toru
AU - Tsuji, Toshihiro
AU - Takeda, Nobuo
AU - Yamanaka, Kazushi
PY - 2010/12/1
Y1 - 2010/12/1
N2 - For efficient control of fuel cells, highly sensitive measurement of the concentration of hydrogen gas (H2) under high humidity is required. In this study, we fabricated the ball SAW sensor with sputtered Pt-coated Zno film as a sensitive film and evaluated the response to H2 of the concentration in the range of 200 ppm to 20 ppm. The thicknesses of ZnO and Pt films are 200 nm and 5 nm, respectively. The sensor succeeded in detecting 20 ppm H2 by the amplitude change of -0.79 dB. After the sensor was wetted by water, the response was measured again. As a result, 20 ppm H2 was detected by 0.4 dB. We calculated the detection limit (DL) defined as the concentration corresponding to the signal to noise ratio of 3. Since DLs before and after wetted was 0.47 ppm and 0.27 ppm, respectively, the sensitive film was not deteriorated by wetting. In conclusion, it was shown that the ball SAW sensor with Ptcoated ZnO film was useful for humidity-proof H2 sensor with sub-ppm DL.
AB - For efficient control of fuel cells, highly sensitive measurement of the concentration of hydrogen gas (H2) under high humidity is required. In this study, we fabricated the ball SAW sensor with sputtered Pt-coated Zno film as a sensitive film and evaluated the response to H2 of the concentration in the range of 200 ppm to 20 ppm. The thicknesses of ZnO and Pt films are 200 nm and 5 nm, respectively. The sensor succeeded in detecting 20 ppm H2 by the amplitude change of -0.79 dB. After the sensor was wetted by water, the response was measured again. As a result, 20 ppm H2 was detected by 0.4 dB. We calculated the detection limit (DL) defined as the concentration corresponding to the signal to noise ratio of 3. Since DLs before and after wetted was 0.47 ppm and 0.27 ppm, respectively, the sensitive film was not deteriorated by wetting. In conclusion, it was shown that the ball SAW sensor with Ptcoated ZnO film was useful for humidity-proof H2 sensor with sub-ppm DL.
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M3 - Conference contribution
AN - SCOPUS:84869099424
SN - 9781617827457
T3 - 20th International Congress on Acoustics 2010, ICA 2010 - Incorporating Proceedings of the 2010 Annual Conference of the Australian Acoustical Society
SP - 2810
EP - 2813
BT - 20th International Congress on Acoustics 2010, ICA 2010 - Incorporating Proceedings of the 2010 Annual Conference of the Australian Acoustical Society
T2 - 20th International Congress on Acoustics 2010, ICA 2010 - Incorporating the 2010 Annual Conference of the Australian Acoustical Society
Y2 - 23 August 2010 through 27 August 2010
ER -