Positive-tone imaging of photo-decomposable polymer LB films

T. Li, M. Mitsuishi, T. Miyashita

Research output: Contribution to journalArticlepeer-review

5 Citations (Scopus)

Abstract

We describe the lithographic properties of poly(N- isopentylmethacrylamide-co-t-butyl 4-vinylphenyl carbonate) [p(iPMA-tBVPC)] which has a structure that is subject to the main chain scission and to deprotection of t-butoxycarbonyloxy group by deep UV irradiation. The positive-tone patterns of the p(iPMA-tBVPC) LB film with 60 layers could be obtained by deep UV light irradiation, followed by development with alkaline aqueous solution. The resolution of the pattern was 0.75 μm, which is the resolution limit of the photomask employed. The photopattern formation with the copolymer [p(iPMA-tBVPC)] LB film was more sensitive than the homopolymer poly(N-isopentylmethacrylamide) [p(iP-MA)] LB film. The etching resistance of the p(iPMA-tBVPC) LB film deposited for the pattern of the gold film is also investigated.

Original languageEnglish
Pages (from-to)1757-1760
Number of pages4
JournalBulletin of the Chemical Society of Japan
Volume74
Issue number9
DOIs
Publication statusPublished - 2001 Sep 1

ASJC Scopus subject areas

  • Chemistry(all)

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