Polymeric optical waveguide components fabricated by direct electron-beam writing technique

Okihiro Sugihara, Yanlong Che, Hisashi Fujimura, Chikara Egami, Naomichi Okamoto

Research output: Contribution to journalConference articlepeer-review

Abstract

Polymeric waveguide components are fabricated with the method of electron-beam (EB) lithography. The depth of development and nonlinear optical property after EB exposure are investigated. A submicron χ(2) grating and an out-of-branching mirror are realized in the polymer film.

Original languageEnglish
Pages (from-to)457-460
Number of pages4
JournalMolecular Crystals and Liquid Crystals Science and Technology Section B: Nonlinear Optics
Volume22
Issue number1-4
Publication statusPublished - 1999 Dec 1
EventProceedings of the 1998 4th International Conference on Organic Nonlinear Optics (ICONO'4) - The 8th IKETANI Conference - Chitose, Jpn
Duration: 1998 Oct 121998 Oct 15

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Condensed Matter Physics

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