Polyimide optical waveguide with multi-fan-out for multichip module system

Takuji Matsumoto, Yasuhiro Kuwana, Akinori Hirose, Hiroyuki Kurino, Mitsumasa Koyanagi

Research output: Contribution to journalConference articlepeer-review

1 Citation (Scopus)


We have been developing a special purpose parallel processor system with a compact size and a high performance specific for the scientific computation. A multichip module (MCM) with a high speed bus is indispensable to achieve such parallel processor system. We have developed a high speed bus for such MCM using a polyimide optical waveguide with micro-mirrors. We can easily obtain many output signals from one input signal in this optical waveguide. Such polyimide optical waveguide with micro-mirrors is formed on a MCM substrate which is called an optical plate. An optical coupling between the polyimide optical waveguide and the laser diode (LD) or the photodetector on LSI chips is performed through the micro-mirror. We observed twenty output signals for the photodetectors from one input signal in the polyimide waveguide of fabricated test module. We have also evaluated the performance of parallel processor system using such MCM with the polyimide optical waveguide by computer simulation.

Original languageEnglish
Pages (from-to)133-144
Number of pages12
JournalProceedings of SPIE - The International Society for Optical Engineering
Publication statusPublished - 1998 Dec 1
EventOptoelectronic Interconnects V - San Jose, CA, United States
Duration: 1998 Jan 281998 Jan 29

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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