Polyimide optical waveguide with multi-fan-out for multichip module application

Takuji Matsumoto, Takeshi Fukuoka, Hiroyuki Kurino, Mitsumasa Koyanagi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We developed a polyimide optical waveguide with multi-fan-out which can be used as an optical interconnection between the many LSI chips in a multichip module system. The propagation direction of the signal light is changed from horizontal to vertical and from vertical to horizontal using aluminum micromirrors in this waveguide. A significant increase of photodiode current was observed when a signal light impinged on the photodiode after it was introduced into this wav:eguide and then the propagation direction was bent by aluminum micromirror.

Original languageEnglish
Title of host publicationEuropean Solid-State Device Research Conference
EditorsH. Grunbacher
PublisherIEEE Computer Society
Pages276-279
Number of pages4
ISBN (Electronic)2863322214
DOIs
Publication statusPublished - 1997 Jan 1
Event27th European Solid-State Device Research Conference, ESSDERC 1997 - Stuttgart, Germany
Duration: 1997 Sep 221997 Sep 24

Publication series

NameEuropean Solid-State Device Research Conference
ISSN (Print)1930-8876

Other

Other27th European Solid-State Device Research Conference, ESSDERC 1997
CountryGermany
CityStuttgart
Period97/9/2297/9/24

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Safety, Risk, Reliability and Quality

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  • Cite this

    Matsumoto, T., Fukuoka, T., Kurino, H., & Koyanagi, M. (1997). Polyimide optical waveguide with multi-fan-out for multichip module application. In H. Grunbacher (Ed.), European Solid-State Device Research Conference (pp. 276-279). (European Solid-State Device Research Conference). IEEE Computer Society. https://doi.org/10.1109/ESSDERC.1997.194419