Polyimide optical waveguide with multi-fan-out for multi-chip module application

Takuji Matsumoto, Yutaka Noguchi, Yoshiharu Kudoh, Mitsumasa Koyanagi

Research output: Contribution to journalArticlepeer-review

9 Citations (Scopus)


We developed a polyimide optical waveguide with multi-fan-out which can be used as an optical interconnection between the many LSI chips in a multichip module system. The propagation direction of the signal light is changed from horizontal to vertical and from vertical to horizontal using aluminum micromirrors in this waveguide. We then introduced a signal light into this waveguide, the propagation direction of which was bent by an aluminum micromirror. It impinged on the photodiode to induce a significant increase in the photodiode current.

Original languageEnglish
Pages (from-to)1903-1906
Number of pages4
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Issue number3 SUPPL. B
Publication statusPublished - 1997 Mar
Externally publishedYes


  • MCM
  • Micromirror
  • Multi-fan-out
  • Parallel processor
  • Polyimide optical waveguide

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)


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