Polyimide optical waveguide with multi-fan-out for multi-chip module application

Takuji Matsumoto; Yutaka Noguchi; Yoshiharu Kudoh; Mitsumasa Koyanagi

doi:10.1143/jjap.36.1903

Polyimide optical waveguide with multi-fan-out for multi-chip module application

Takuji Matsumoto, Yutaka Noguchi, Yoshiharu Kudoh, Mitsumasa Koyanagi

Research output: Contribution to journal › Article › peer-review

9 Citations (Scopus)

Abstract

We developed a polyimide optical waveguide with multi-fan-out which can be used as an optical interconnection between the many LSI chips in a multichip module system. The propagation direction of the signal light is changed from horizontal to vertical and from vertical to horizontal using aluminum micromirrors in this waveguide. We then introduced a signal light into this waveguide, the propagation direction of which was bent by an aluminum micromirror. It impinged on the photodiode to induce a significant increase in the photodiode current.

Original language	English
Pages (from-to)	1903-1906
Number of pages	4
Journal	Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume	36
Issue number	3 SUPPL. B
DOIs	https://doi.org/10.1143/jjap.36.1903
Publication status	Published - 1997 Mar
Externally published	Yes

Keywords

MCM
Micromirror
Multi-fan-out
Parallel processor
Polyimide optical waveguide

ASJC Scopus subject areas

Engineering(all)
Physics and Astronomy(all)

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10.1143/jjap.36.1903

Cite this

@article{a311b0e257d14c3891b4beba02f020b4,

title = "Polyimide optical waveguide with multi-fan-out for multi-chip module application",

abstract = "We developed a polyimide optical waveguide with multi-fan-out which can be used as an optical interconnection between the many LSI chips in a multichip module system. The propagation direction of the signal light is changed from horizontal to vertical and from vertical to horizontal using aluminum micromirrors in this waveguide. We then introduced a signal light into this waveguide, the propagation direction of which was bent by an aluminum micromirror. It impinged on the photodiode to induce a significant increase in the photodiode current.",

keywords = "MCM, Micromirror, Multi-fan-out, Parallel processor, Polyimide optical waveguide",

author = "Takuji Matsumoto and Yutaka Noguchi and Yoshiharu Kudoh and Mitsumasa Koyanagi",

year = "1997",

month = mar,

doi = "10.1143/jjap.36.1903",

language = "English",

volume = "36",

pages = "1903--1906",

journal = "Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes",

issn = "0021-4922",

publisher = "Japan Society of Applied Physics",

number = "3 SUPPL. B",

}

TY - JOUR

T1 - Polyimide optical waveguide with multi-fan-out for multi-chip module application

AU - Matsumoto, Takuji

AU - Noguchi, Yutaka

AU - Kudoh, Yoshiharu

AU - Koyanagi, Mitsumasa

PY - 1997/3

Y1 - 1997/3

N2 - We developed a polyimide optical waveguide with multi-fan-out which can be used as an optical interconnection between the many LSI chips in a multichip module system. The propagation direction of the signal light is changed from horizontal to vertical and from vertical to horizontal using aluminum micromirrors in this waveguide. We then introduced a signal light into this waveguide, the propagation direction of which was bent by an aluminum micromirror. It impinged on the photodiode to induce a significant increase in the photodiode current.

AB - We developed a polyimide optical waveguide with multi-fan-out which can be used as an optical interconnection between the many LSI chips in a multichip module system. The propagation direction of the signal light is changed from horizontal to vertical and from vertical to horizontal using aluminum micromirrors in this waveguide. We then introduced a signal light into this waveguide, the propagation direction of which was bent by an aluminum micromirror. It impinged on the photodiode to induce a significant increase in the photodiode current.

KW - MCM

KW - Micromirror

KW - Multi-fan-out

KW - Parallel processor

KW - Polyimide optical waveguide

UR - http://www.scopus.com/inward/record.url?scp=0001462031&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0001462031&partnerID=8YFLogxK

U2 - 10.1143/jjap.36.1903

DO - 10.1143/jjap.36.1903

M3 - Article

AN - SCOPUS:0001462031

SN - 0021-4922

VL - 36

SP - 1903

EP - 1906

JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

IS - 3 SUPPL. B

ER -

Polyimide optical waveguide with multi-fan-out for multi-chip module application

Abstract

Keywords

ASJC Scopus subject areas

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