Poly-SiGe-based MEMS thin-film encapsulation

Bin Guo, Bo Wang, Lianggong Wen, Philippe Helin, Gert Claes, Jeroen De Coster, Bert Du Bois, Agnes Verbist, Rita Van Hoof, Guy Vereecke, Luc Haspeslagh, Harrie A.C. Tilmans, Stefaan Decoutere, Haris Osman, Robert Puers, Ingrid De Wolf, Shuji Tanaka, Simone Severi, Ann Witvrouw

Research output: Contribution to journalArticlepeer-review

17 Citations (Scopus)

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Engineering & Materials Science