Polarization performance of EUV transmission multilayers as λ/4 and λ/2 plates at a photon energy of 97 eV

Masaki Yamamoto, Hiroshi Nomura, Mihiro Yanagihara, Minaji Furudate, Makoto Watanabe

Research output: Contribution to journalArticlepeer-review

9 Citations (Scopus)

Abstract

Complex relative amplitude transmittance p = Tp/Ts of extreme ultraviolet transmission multilayers fabricated to three numbers of layers has been evaluated by ellipsometry with synchrotron radiation at a photon energy of 97 eV. Large phase shifts enough to be a quarter-wave plate and a half-wave plate have been observed with respective transmittances of 10 and 0.5%.

Original languageEnglish
Pages (from-to)869-873
Number of pages5
JournalJournal of Electron Spectroscopy and Related Phenomena
Volume101-103
DOIs
Publication statusPublished - 1999

Keywords

  • EUV transmission multilayers
  • Ellipsometry
  • Polarization
  • Synchrotron

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Radiation
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Spectroscopy
  • Physical and Theoretical Chemistry

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