Polarization performance of EUV transmission multilayers as λ/4 and λ/2 plates at a photon energy of 97 eV

Masaki Yamamoto; Hiroshi Nomura; Mihiro Yanagihara; Minaji Furudate; Makoto Watanabe

doi:10.1016/s0368-2048(98)00403-4

Polarization performance of EUV transmission multilayers as λ/4 and λ/2 plates at a photon energy of 97 eV

Masaki Yamamoto, Hiroshi Nomura, Mihiro Yanagihara, Minaji Furudate, Makoto Watanabe

Institute of Multidisciplinary Research for Advanced Materials (IMRAM)

Research output: Contribution to journal › Article › peer-review

9 Citations (Scopus)

Abstract

Complex relative amplitude transmittance p = T_p/T_s of extreme ultraviolet transmission multilayers fabricated to three numbers of layers has been evaluated by ellipsometry with synchrotron radiation at a photon energy of 97 eV. Large phase shifts enough to be a quarter-wave plate and a half-wave plate have been observed with respective transmittances of 10 and 0.5%.

Original language	English
Pages (from-to)	869-873
Number of pages	5
Journal	Journal of Electron Spectroscopy and Related Phenomena
Volume	101-103
DOIs	https://doi.org/10.1016/s0368-2048(98)00403-4
Publication status	Published - 1999

Keywords

EUV transmission multilayers
Ellipsometry
Polarization
Synchrotron

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Radiation
Atomic and Molecular Physics, and Optics
Condensed Matter Physics
Spectroscopy
Physical and Theoretical Chemistry

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title = "Polarization performance of EUV transmission multilayers as λ/4 and λ/2 plates at a photon energy of 97 eV",

abstract = "Complex relative amplitude transmittance p = Tp/Ts of extreme ultraviolet transmission multilayers fabricated to three numbers of layers has been evaluated by ellipsometry with synchrotron radiation at a photon energy of 97 eV. Large phase shifts enough to be a quarter-wave plate and a half-wave plate have been observed with respective transmittances of 10 and 0.5%.",

keywords = "EUV transmission multilayers, Ellipsometry, Polarization, Synchrotron",

author = "Masaki Yamamoto and Hiroshi Nomura and Mihiro Yanagihara and Minaji Furudate and Makoto Watanabe",

year = "1999",

doi = "10.1016/s0368-2048(98)00403-4",

language = "English",

volume = "101-103",

pages = "869--873",

journal = "Journal of Electron Spectroscopy and Related Phenomena",

issn = "0368-2048",

publisher = "Elsevier",

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TY - JOUR

T1 - Polarization performance of EUV transmission multilayers as λ/4 and λ/2 plates at a photon energy of 97 eV

AU - Yamamoto, Masaki

AU - Nomura, Hiroshi

AU - Yanagihara, Mihiro

AU - Furudate, Minaji

AU - Watanabe, Makoto

PY - 1999

Y1 - 1999

N2 - Complex relative amplitude transmittance p = Tp/Ts of extreme ultraviolet transmission multilayers fabricated to three numbers of layers has been evaluated by ellipsometry with synchrotron radiation at a photon energy of 97 eV. Large phase shifts enough to be a quarter-wave plate and a half-wave plate have been observed with respective transmittances of 10 and 0.5%.

AB - Complex relative amplitude transmittance p = Tp/Ts of extreme ultraviolet transmission multilayers fabricated to three numbers of layers has been evaluated by ellipsometry with synchrotron radiation at a photon energy of 97 eV. Large phase shifts enough to be a quarter-wave plate and a half-wave plate have been observed with respective transmittances of 10 and 0.5%.

KW - EUV transmission multilayers

KW - Ellipsometry

KW - Polarization

KW - Synchrotron

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UR - http://www.scopus.com/inward/citedby.url?scp=0003623916&partnerID=8YFLogxK

U2 - 10.1016/s0368-2048(98)00403-4

DO - 10.1016/s0368-2048(98)00403-4

M3 - Article

AN - SCOPUS:0003623916

VL - 101-103

SP - 869

EP - 873

JO - Journal of Electron Spectroscopy and Related Phenomena

JF - Journal of Electron Spectroscopy and Related Phenomena

SN - 0368-2048

ER -

Polarization performance of EUV transmission multilayers as λ/4 and λ/2 plates at a photon energy of 97 eV

Abstract

Keywords

ASJC Scopus subject areas

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