Abstract
Complex relative amplitude transmittance p = Tp/Ts of extreme ultraviolet transmission multilayers fabricated to three numbers of layers has been evaluated by ellipsometry with synchrotron radiation at a photon energy of 97 eV. Large phase shifts enough to be a quarter-wave plate and a half-wave plate have been observed with respective transmittances of 10 and 0.5%.
Original language | English |
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Pages (from-to) | 869-873 |
Number of pages | 5 |
Journal | Journal of Electron Spectroscopy and Related Phenomena |
Volume | 101-103 |
DOIs | |
Publication status | Published - 1999 |
Keywords
- EUV transmission multilayers
- Ellipsometry
- Polarization
- Synchrotron
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Radiation
- Atomic and Molecular Physics, and Optics
- Condensed Matter Physics
- Spectroscopy
- Physical and Theoretical Chemistry