Pneumatic Micro Valve Based On Silicon Micromachining

Dong Youn Sim, Toru Kurabayashi, Masayoshi Esashi

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)

Abstract

A silicon microvalve to control fine gas flow was developed for advanced semiconductor fabrication processes. The valve is operated by a combination of pneumatic and electrostatic forces. It is composed of a glass-silicon-silicon-glass structure using silicon bulk micromachining. An anodically bonded glass-silicon combination is further bonded to another glass-silicon combination using Au-Si eutectic bonding. The structure has a built-in bias force for closing the valve normally. A polished silicon surface is utilized as a valve seat in order to decrease the gas leakage. The valve has corrugated diaphragms to increase maximum gas flow rate. The gas flow rate could be controlled from 0.1 sccm to 35 sccm at the the inlet pressure range of 0.13 ~ 0.66kgf cm2. This microvalve can be used in the temperature range from 25 to 120°C.

Original languageEnglish
Pages (from-to)56-61
Number of pages6
JournalIEEJ Transactions on Sensors and Micromachines
Volume116
Issue number2
DOIs
Publication statusPublished - 1996

Keywords

  • Aa-Si eutectie bonding
  • micromachining
  • microvalve

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering

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