Plasmonic enhancements of photoluminescence in hybrid Si nanostructures with Au fabricated by fully top-down lithography

Koudo Nakaji, Hao Li, Takayuki Kiba, Makoto Igarashi, Seiji Samukawa, Akihiro Murayama

Research output: Contribution to journalArticle

9 Citations (Scopus)

Abstract

The authors study plasmonic enhancements of photoluminescence (PL) in Si nanodisk (ND) arrays hybridized with nanostructures such as nanoplates of Au, where these hybrid nanostructures are fabricated by fully top-down lithography: neutral-beam etching using bio-nano-templates and high-resolution electron-beam lithography. The separation distance between the Si ND and Au nanostructure surfaces is precisely controlled by inserting a thin SiO2 layer with a thickness of 3 nm. We observe that PL intensities in the Si NDs are enhanced by factors up to 5 depending on the wavelength by integrating with the Au nanoplates. These enhancements also depend on the size and shape of the Au nanoplates.

Original languageEnglish
Article number629
Pages (from-to)1-5
Number of pages5
JournalNanoscale Research Letters
Volume7
DOIs
Publication statusPublished - 2012 Jan 1

Keywords

  • Au
  • Bio-nano-templates
  • Electron-beam lithography
  • Hybrid nanostructures
  • Neutral-beam etching
  • Photoluminescence
  • Plasmonic enhancements
  • Si nanodisk

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics

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