Plasma surface treatment of polymers with inductivity-coupled RF plasmas driven by low-inductance antenna units

Yuichi Setsuhara, Ken Cho, Kosuke Takenaka, Akinori Ebe, Masaharu Shiratani, Makoto Sekine, Masaru Hori, Eiji Ikenaga, Hiroki Kondo, Osamu Nakatsuka, Shigeaki Zaima

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21 Citations (Scopus)

Abstract

Plasma surface treatment of polymers has been carried out with argon/oxygen mixture plasmas driven by multiple low-inductance antenna units. Kinetic energy distribution of argon ions from the argon/oxygen mixture plasmas onto polymers showed considerable suppression of ion energies sufficiently less than 10 eV. Polyethyleneterephthalate (PET) films were exposed to argon/oxygen mixture plasma for 1-5 min on a water-cooled substrate holder. The etching depth of PET surface increased with increasing plasma-exposure time and the etching rate was 118 nm/min. Surface roughness of PET surface (root-mean-square value) increased from 0.5 nm to 2.7 nm with increasing plasma-exposure time from 0 min (original sample) to 5 min. Hard X-ray photoelectron spectroscopy (HXPES) was carried out for analysis of chemical bonding states of the PET surface. The HXPES analyses exhibited nano-surface modification of the PET surface without suffering degradation of molecular structures beneath.

Original languageEnglish
Pages (from-to)1006-1011
Number of pages6
JournalThin Solid Films
Volume518
Issue number3
DOIs
Publication statusPublished - 2009 Dec 30

Keywords

  • Hard X-ray photoelectron spectroscopy
  • Inductively-coupled plasma
  • Low-damage process
  • Low-inductance antenna
  • Polymer

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

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    Setsuhara, Y., Cho, K., Takenaka, K., Ebe, A., Shiratani, M., Sekine, M., Hori, M., Ikenaga, E., Kondo, H., Nakatsuka, O., & Zaima, S. (2009). Plasma surface treatment of polymers with inductivity-coupled RF plasmas driven by low-inductance antenna units. Thin Solid Films, 518(3), 1006-1011. https://doi.org/10.1016/j.tsf.2009.07.161