Plasma expansion from a radio frequency microdischarge

Rod Boswell, Christine Charles, Peter Alexander, James Dedrick, Kazunori Takahashi

Research output: Contribution to journalArticlepeer-review

21 Citations (Scopus)

Abstract

Plasma expansion of a capacitively coupled radio frequency (13.56 MHz) argon microdischarge into a larger glass tube is studied by acquisition and analysis of high-resolution digital images. The microdischarge operating conditions are a flow of about 1.5 L/min, a pressure of 7 torr, and a power of 10 W. Interesting plume patterns can be generated, and an example of plasma striations within the plume is shown.

Original languageEnglish
Article number5771122
Pages (from-to)2512-2513
Number of pages2
JournalIEEE Transactions on Plasma Science
Volume39
Issue number11 PART 1
DOIs
Publication statusPublished - 2011 Nov
Externally publishedYes

Keywords

  • Aerospace engineering
  • plasma sources

ASJC Scopus subject areas

  • Nuclear and High Energy Physics
  • Condensed Matter Physics

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