Plasma diagnostics and low-temperature deposition of microcrystalline silicon films in ultrahigh-frequency silane plasma

Shigeaki Sumiya, Yuko Mizutani, Ryohei Yoshida, Masaru Hori, Toshio Goto, Masafumi Ito, Tsutomu Tsukada, Seiji Samukawa

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19 Citations (Scopus)

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Physics & Astronomy