Plasma deposition of low-dielectric-constant fluorinated amorphous carbon

Kazuhiko Endo, Keisuke Shinoda, Toru Tatsumi

Research output: Contribution to journalArticlepeer-review

166 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Plasma deposition of low-dielectric-constant fluorinated amorphous carbon'. Together they form a unique fingerprint.

Physics & Astronomy