Abstract
This paper reports a new planer fabrication method of multilayer piezoelectric actuator. In this method, three techniques, dicing, electroplating and laser assisted etching (LAE), were used for constructing the multilayer structure. Prototype actuators with 23-120 active layers were fabricated in this method. The measured displacement was 2.5 μm (23 layers) and 7.3 μm (120 layers) at 100 V, respectively. These values agree with the calculated values from the piezoelectric properties of the material.
| Original language | English |
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| Pages | 46-51 |
| Number of pages | 6 |
| Publication status | Published - 2000 Jan 1 |
| Event | 13th Annual International Conference on Micro Electro Mechanical Systems (MEMS 2000) - Miyazaki, Jpn Duration: 2000 Jan 23 → 2000 Jan 27 |
Other
| Other | 13th Annual International Conference on Micro Electro Mechanical Systems (MEMS 2000) |
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| City | Miyazaki, Jpn |
| Period | 00/1/23 → 00/1/27 |
ASJC Scopus subject areas
- Control and Systems Engineering
- Electrical and Electronic Engineering
- Mechanical Engineering