Plane-view transmission electron microscopy of Si/GaAs interfaces fabricated by surface-activated bonding at room temperature

Yutaka Ohno, Hideto Yoshida, Seiji Takeda, Liang Jianbo, Naoteru Shigekawa

Research output: Chapter in Book/Report/Conference proceedingConference contribution

5 Citations (Scopus)

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Chemical Compounds

Engineering & Materials Science