Pitch-variable transmission-type bulk gratings driven by shape memory alloy actuator

Yigui Li, Shuhai Jia, Hongkun Wang, Di Chen, Kazuhiro Hane

Research output: Contribution to journalArticlepeer-review

16 Citations (Scopus)


This paper describes a novel pitch-variable transmission-type bulk grating fabricated by silicon micromachining technology driven by a shape memory alloy (SMA) actuator. The grating is specially designed to change the pitch easily with a small force and assured moderate stress by finite element method. Using deep reactive ion etching (deep-RIE) technology, the grating has a high aspect ratio more than 10. In the diffraction experiment, more than 10% extension ratio has been obtained. The SMA actuator has been installed to the grating. Due to the two-way shape memory effect, the translation mechanism is simple and is easily controlled.

Original languageEnglish
Pages (from-to)649-653
Number of pages5
JournalOptics and Laser Technology
Issue number8
Publication statusPublished - 2002 Nov


  • Deep-RIE
  • SMA actuator
  • Transmission-type bulk grating

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Electrical and Electronic Engineering


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