Pitch-variable transmission-type bulk gratings driven by shape memory alloy actuator

Yigui Li; Shuhai Jia; Hongkun Wang; Di Chen; Kazuhiro Hane

doi:10.1016/S0030-3992(02)00089-0

Pitch-variable transmission-type bulk gratings driven by shape memory alloy actuator

Yigui Li, Shuhai Jia, Hongkun Wang, Di Chen, Kazuhiro Hane

New Industry Creation Hatchery Center (NICHe)

Research output: Contribution to journal › Article › peer-review

16 Citations (Scopus)

Abstract

This paper describes a novel pitch-variable transmission-type bulk grating fabricated by silicon micromachining technology driven by a shape memory alloy (SMA) actuator. The grating is specially designed to change the pitch easily with a small force and assured moderate stress by finite element method. Using deep reactive ion etching (deep-RIE) technology, the grating has a high aspect ratio more than 10. In the diffraction experiment, more than 10% extension ratio has been obtained. The SMA actuator has been installed to the grating. Due to the two-way shape memory effect, the translation mechanism is simple and is easily controlled.

Original language	English
Pages (from-to)	649-653
Number of pages	5
Journal	Optics and Laser Technology
Volume	34
Issue number	8
DOIs	https://doi.org/10.1016/S0030-3992(02)00089-0
Publication status	Published - 2002 Nov

Keywords

Deep-RIE
SMA actuator
Transmission-type bulk grating

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics
Electrical and Electronic Engineering

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10.1016/S0030-3992(02)00089-0

Cite this

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abstract = "This paper describes a novel pitch-variable transmission-type bulk grating fabricated by silicon micromachining technology driven by a shape memory alloy (SMA) actuator. The grating is specially designed to change the pitch easily with a small force and assured moderate stress by finite element method. Using deep reactive ion etching (deep-RIE) technology, the grating has a high aspect ratio more than 10. In the diffraction experiment, more than 10% extension ratio has been obtained. The SMA actuator has been installed to the grating. Due to the two-way shape memory effect, the translation mechanism is simple and is easily controlled.",

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AU - Li, Yigui

AU - Jia, Shuhai

AU - Wang, Hongkun

AU - Chen, Di

AU - Hane, Kazuhiro

PY - 2002/11

Y1 - 2002/11

N2 - This paper describes a novel pitch-variable transmission-type bulk grating fabricated by silicon micromachining technology driven by a shape memory alloy (SMA) actuator. The grating is specially designed to change the pitch easily with a small force and assured moderate stress by finite element method. Using deep reactive ion etching (deep-RIE) technology, the grating has a high aspect ratio more than 10. In the diffraction experiment, more than 10% extension ratio has been obtained. The SMA actuator has been installed to the grating. Due to the two-way shape memory effect, the translation mechanism is simple and is easily controlled.

AB - This paper describes a novel pitch-variable transmission-type bulk grating fabricated by silicon micromachining technology driven by a shape memory alloy (SMA) actuator. The grating is specially designed to change the pitch easily with a small force and assured moderate stress by finite element method. Using deep reactive ion etching (deep-RIE) technology, the grating has a high aspect ratio more than 10. In the diffraction experiment, more than 10% extension ratio has been obtained. The SMA actuator has been installed to the grating. Due to the two-way shape memory effect, the translation mechanism is simple and is easily controlled.

KW - Deep-RIE

KW - SMA actuator

KW - Transmission-type bulk grating

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Pitch-variable transmission-type bulk gratings driven by shape memory alloy actuator

Abstract

Keywords

ASJC Scopus subject areas

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