Pitch-variable MEMS grating with 4-level blazed surface

Y. Wang; Yoshiaki Kanamori; Kazuhiro Hane

doi:10.1109/SENSOR.2009.5285850

Pitch-variable MEMS grating with 4-level blazed surface

Y. Wang, Yoshiaki Kanamori, Kazuhiro Hane

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Citation (Scopus)

Abstract

Pitch-variable gratings with blazed surface profiles are designed and fabricated by combining silicon-on-insulator (SOI) technology with microelectronicmechanical system (MEMS) technology. A two-mask process is employed to realize 4-level blazed surface profile, and electrostatic combdrive microactuators are used to stretch the freestanding grating beams. The experimental results indicate the fabricated 4-level blazed gratings could realize large tuning range and achieve high diffraction efficiency.

Original language	English
Title of host publication	TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
Pages	1345-1348
Number of pages	4
DOIs	https://doi.org/10.1109/SENSOR.2009.5285850
Publication status	Published - 2009 Dec 11
Event	TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems - Denver, CO, United States Duration: 2009 Jun 21 → 2009 Jun 25

Publication series

Name	TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

Other

Other	TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
Country	United States
City	Denver, CO
Period	09/6/21 → 09/6/25

Keywords

Fast atom beam etching
Silicon-on-insulator
Tunable blazed grating

ASJC Scopus subject areas

Hardware and Architecture
Electrical and Electronic Engineering

Access to Document

10.1109/SENSOR.2009.5285850

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Wang, Y., Kanamori, Y., & Hane, K. (2009). Pitch-variable MEMS grating with 4-level blazed surface. In TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems (pp. 1345-1348). [5285850] (TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems). https://doi.org/10.1109/SENSOR.2009.5285850

Pitch-variable MEMS grating with 4-level blazed surface. / Wang, Y.; Kanamori, Yoshiaki ; Hane, Kazuhiro.

TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems. 2009. p. 1345-1348 5285850 (TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Wang, Y, Kanamori, Y & Hane, K 2009, Pitch-variable MEMS grating with 4-level blazed surface. in TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems., 5285850, TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems, pp. 1345-1348, TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems, Denver, CO, United States, 09/6/21. https://doi.org/10.1109/SENSOR.2009.5285850

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N2 - Pitch-variable gratings with blazed surface profiles are designed and fabricated by combining silicon-on-insulator (SOI) technology with microelectronicmechanical system (MEMS) technology. A two-mask process is employed to realize 4-level blazed surface profile, and electrostatic combdrive microactuators are used to stretch the freestanding grating beams. The experimental results indicate the fabricated 4-level blazed gratings could realize large tuning range and achieve high diffraction efficiency.

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