TY - GEN
T1 - Pitch-variable MEMS grating with 4-level blazed surface
AU - Wang, Y.
AU - Kanamori, Yoshiaki
AU - Hane, Kazuhiro
PY - 2009/12/11
Y1 - 2009/12/11
N2 - Pitch-variable gratings with blazed surface profiles are designed and fabricated by combining silicon-on-insulator (SOI) technology with microelectronicmechanical system (MEMS) technology. A two-mask process is employed to realize 4-level blazed surface profile, and electrostatic combdrive microactuators are used to stretch the freestanding grating beams. The experimental results indicate the fabricated 4-level blazed gratings could realize large tuning range and achieve high diffraction efficiency.
AB - Pitch-variable gratings with blazed surface profiles are designed and fabricated by combining silicon-on-insulator (SOI) technology with microelectronicmechanical system (MEMS) technology. A two-mask process is employed to realize 4-level blazed surface profile, and electrostatic combdrive microactuators are used to stretch the freestanding grating beams. The experimental results indicate the fabricated 4-level blazed gratings could realize large tuning range and achieve high diffraction efficiency.
KW - Fast atom beam etching
KW - Silicon-on-insulator
KW - Tunable blazed grating
UR - http://www.scopus.com/inward/record.url?scp=71449099595&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=71449099595&partnerID=8YFLogxK
U2 - 10.1109/SENSOR.2009.5285850
DO - 10.1109/SENSOR.2009.5285850
M3 - Conference contribution
AN - SCOPUS:71449099595
SN - 9781424441938
T3 - TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
SP - 1345
EP - 1348
BT - TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
T2 - TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
Y2 - 21 June 2009 through 25 June 2009
ER -