Pinpoint pick-up and bubble-free assembly of 2D materials using PDMS/PMMA polymers with lens shapes

Satoshi Toyoda, Teerayut Uwanno, Takashi Taniguchi, Kenji Watanabe, Kosuke Nagashio

Research output: Contribution to journalArticlepeer-review

16 Citations (Scopus)

Abstract

The key to achieving high-quality van der Waals heterostructure devices made by stacking 2D layered materials lies in having a clean interface without interfacial bubbles and wrinkles. In this study, the pinpoint pick-up and transfer system of 2D crystals is constructed using polymers with lens shapes. We report the bubble-free and clean interface assembly of 2D crystals in which unidirectional sweep of the transfer interface precisely controlled with the help of the inclined substrate pushes the bubbles away from the interface.

Original languageEnglish
Article number055008
JournalApplied Physics Express
Volume12
Issue number5
DOIs
Publication statusPublished - 2019 May 1
Externally publishedYes

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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