Abstract
A piezoresistive rotation angle sensor is integrated in a micromirror device. The sensor signal is the voltage generated by the shear piezoresistance effect. This sensor has the advantage of being a single element which can be included in a torsion bar. The sensor signal is confirmed to be proportional to the mirror rotation. By taking advantage of the crystal orientation dependence, the sensor can be designed to be sensitive to the mirror rotation and insensitive to the shift motion.
| Original language | English |
|---|---|
| Pages (from-to) | 3789-3793 |
| Number of pages | 5 |
| Journal | Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers |
| Volume | 45 |
| Issue number | 4 B |
| DOIs | |
| Publication status | Published - 2006 Apr 25 |
Keywords
- Microactuator
- Micromirror
- Rotation angle sensor
- Shear piezoresistance coefficient
ASJC Scopus subject areas
- Engineering(all)
- Physics and Astronomy(all)