Piezoresistive displacement sensor integrated in resonant varifocal mirror

K. Nakazawa, T. Sasaki, H. Furuta, J. Kamiya, T. Kamiya, K. Hane

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

An electrostatically actuated resonant varifocal mirror with a piezoresistive displacement sensor is reported. The focal length of the varifocal mirror is monitored by the sensor. The device is fabricated from a silicon-on-insulator wafer and a glass wafer. The p-type silicon region which is formed in n-type top silicon layer by boron ion implantation is used as the piezoresistive displacement sensor. The mirror surface profile and sensor signal are measured.

Original languageEnglish
Title of host publicationOMN 2015 Jerusalem - 2015 International Conference on Optical MEMS and Nanophotonics, Proceedings
PublisherIEEE Computer Society
ISBN (Electronic)9781467368346
DOIs
Publication statusPublished - 2015 Oct 2
EventInternational Conference on Optical MEMS and Nanophotonics, OMN 2015 - Jerusalem, Israel
Duration: 2015 Aug 22015 Aug 5

Publication series

NameInternational Conference on Optical MEMS and Nanophotonics
Volume02-05-August-2015
ISSN (Print)2160-5033
ISSN (Electronic)2160-5041

Other

OtherInternational Conference on Optical MEMS and Nanophotonics, OMN 2015
CountryIsrael
CityJerusalem
Period15/8/215/8/5

Keywords

  • Piezorestive sensor
  • Resonant
  • Varifocal mirror

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

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