Piezolectric 2D micro scanner for minimally invasive therapy fabricated using femtosecond laser ablation

N. Kikuchi, Y. Haga, M. Maeda, W. Makishi, M. Esashi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

9 Citations (Scopus)

Abstract

Piezoelectric two dimensional (2D) micro scanner was developed for medical laser scanning micro tool that is inserted in the human body and observes tissue microstructures optically and scans laser for treatment. The structure of developed micro scanner consists of three piezoelectric unimorph cantilevers, a mirror, three flexible joints and a pivot. The joints link the end of the unimorph cantilevers with the mirror. The size of the micro scanner part is 1.6 mmx5.0 mm, and the thickness is 100 μm. The mirror tilted in two dimensions and maximum tilting angle was 2.23 degree when 60 V was applied. The 2D scanner and optical system will be packaged in a tube of 2 mm diameter which can be inserted in a working channel of a conventional endscope.

Original languageEnglish
Title of host publicationTRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages603-606
Number of pages4
ISBN (Electronic)0780377311, 9780780377318
DOIs
Publication statusPublished - 2003
Event12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers - Boston, United States
Duration: 2003 Jun 82003 Jun 12

Publication series

NameTRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
Volume1

Other

Other12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers
CountryUnited States
CityBoston
Period03/6/803/6/12

Keywords

  • Biomedical optical imaging
  • Humans
  • Joints
  • Laser ablation
  • Medical treatment
  • Microstructure
  • Minimally invasive surgery
  • Mirrors
  • Packaging
  • Ultrafast optics

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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  • Cite this

    Kikuchi, N., Haga, Y., Maeda, M., Makishi, W., & Esashi, M. (2003). Piezolectric 2D micro scanner for minimally invasive therapy fabricated using femtosecond laser ablation. In TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers (pp. 603-606). [1215545] (TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers; Vol. 1). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/SENSOR.2003.1215545