TY - GEN
T1 - Piezoelectric Tantalum Aluminum Nitride Grown on Stainless Steel for Low-Frequency Vibration-Driven Energy Harvesters
AU - Van Minh, Le
AU - Kuwano, Hiroki
N1 - Funding Information:
This work was partially supported by JSPS KAKENHI Grant Number JP20K15146.
Publisher Copyright:
© 2022 IEEE.
PY - 2022
Y1 - 2022
N2 - This work presents Ta-doped AlN films grown on stainless steels (SUS 430) by alternative current reactive magnetron sputtering from Al and Ta targets. Also, the bimorph Ta-AlN/SUS/Ta-AlN-based energy harvester (EH) was developed for targeting low-frequency onsite ambient vibrations (below 100 Hz). Ta-AlN of 5 μm thick on SUS had a highly-(002) orientation with a rocking-curve FWHM of 3 deg. The Ta-AlN/SUS/Ta-AlN-based EH provided the output power of 1.92 mW at 1g and 84 Hz. The normalized power density (NPD) was 33.6 mW.g-2.cm-3. It is the highest among those published low-frequency energy harvesters.
AB - This work presents Ta-doped AlN films grown on stainless steels (SUS 430) by alternative current reactive magnetron sputtering from Al and Ta targets. Also, the bimorph Ta-AlN/SUS/Ta-AlN-based energy harvester (EH) was developed for targeting low-frequency onsite ambient vibrations (below 100 Hz). Ta-AlN of 5 μm thick on SUS had a highly-(002) orientation with a rocking-curve FWHM of 3 deg. The Ta-AlN/SUS/Ta-AlN-based EH provided the output power of 1.92 mW at 1g and 84 Hz. The normalized power density (NPD) was 33.6 mW.g-2.cm-3. It is the highest among those published low-frequency energy harvesters.
KW - energy harvesters
KW - piezoelectric thin films
KW - Power MEMS
KW - Ta-doped AlN
UR - http://www.scopus.com/inward/record.url?scp=85147033538&partnerID=8YFLogxK
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U2 - 10.1109/PowerMEMS56853.2022.10007086
DO - 10.1109/PowerMEMS56853.2022.10007086
M3 - Conference contribution
AN - SCOPUS:85147033538
T3 - 2022 21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, PowerMEMS 2022
SP - 154
EP - 157
BT - 2022 21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, PowerMEMS 2022
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, PowerMEMS 2022
Y2 - 12 December 2022 through 15 December 2022
ER -
