Piezoelectric properties of ZnO films deposited by an ECR sputtering System

Michio Kadota; Toru Kasanami; Makoto Minakata

Piezoelectric properties of ZnO films deposited by an ECR sputtering System

Michio Kadota, Toru Kasanami, Makoto Minakata

ENG - Robotics

Research output: Contribution to journal › Article › peer-review

1 Citation (Scopus)

Abstract

The formation of ZnO piezoelectric films has been attempted using the electron cyclotron resonance (ECR) sputtering system. It has been confirmed that this system is capable of depositing a ZnO piezoelectric film with a specific resistance of 10¹⁰ to 10¹¹ ohms-cm and c-axis orientation with a standard deviation of δ = 0.19 degrees on an IDT (comb-shaped electrode)/glass substrate at a low temperature (no substrate heating ≈ 200°C) and low gas pressure (≈10^- torr).

Original language	English
Pages (from-to)	1-9
Number of pages	9
Journal	Electronics and Communications in Japan, Part III: Fundamental Electronic Science (English translation of Denshi Tsushin Gakkai Ronbunshi)
Volume	76
Issue number	11
Publication status	Published - 1993 Nov 1

ASJC Scopus subject areas

Electrical and Electronic Engineering

Cite this

Piezoelectric properties of ZnO films deposited by an ECR sputtering System. / Kadota, Michio; Kasanami, Toru; Minakata, Makoto.

In: Electronics and Communications in Japan, Part III: Fundamental Electronic Science (English translation of Denshi Tsushin Gakkai Ronbunshi), Vol. 76, No. 11, 01.11.1993, p. 1-9.

Research output: Contribution to journal › Article › peer-review

@article{0d8e337f97d04b5fb9da4540c72cec61,

title = "Piezoelectric properties of ZnO films deposited by an ECR sputtering System",

abstract = "The formation of ZnO piezoelectric films has been attempted using the electron cyclotron resonance (ECR) sputtering system. It has been confirmed that this system is capable of depositing a ZnO piezoelectric film with a specific resistance of 1010 to 1011 ohms-cm and c-axis orientation with a standard deviation of δ = 0.19 degrees on an IDT (comb-shaped electrode)/glass substrate at a low temperature (no substrate heating ≈ 200°C) and low gas pressure (≈10- torr).",

author = "Michio Kadota and Toru Kasanami and Makoto Minakata",

year = "1993",

month = nov,

day = "1",

language = "English",

volume = "76",

pages = "1--9",

journal = "Electronics and Communications in Japan, Part III: Fundamental Electronic Science (English translation of Denshi Tsushin Gakkai Ronbunshi)",

issn = "1042-0967",

publisher = "John Wiley and Sons Inc.",

number = "11",

}

TY - JOUR

T1 - Piezoelectric properties of ZnO films deposited by an ECR sputtering System

AU - Kadota, Michio

AU - Kasanami, Toru

AU - Minakata, Makoto

PY - 1993/11/1

Y1 - 1993/11/1

N2 - The formation of ZnO piezoelectric films has been attempted using the electron cyclotron resonance (ECR) sputtering system. It has been confirmed that this system is capable of depositing a ZnO piezoelectric film with a specific resistance of 1010 to 1011 ohms-cm and c-axis orientation with a standard deviation of δ = 0.19 degrees on an IDT (comb-shaped electrode)/glass substrate at a low temperature (no substrate heating ≈ 200°C) and low gas pressure (≈10- torr).

AB - The formation of ZnO piezoelectric films has been attempted using the electron cyclotron resonance (ECR) sputtering system. It has been confirmed that this system is capable of depositing a ZnO piezoelectric film with a specific resistance of 1010 to 1011 ohms-cm and c-axis orientation with a standard deviation of δ = 0.19 degrees on an IDT (comb-shaped electrode)/glass substrate at a low temperature (no substrate heating ≈ 200°C) and low gas pressure (≈10- torr).

UR - http://www.scopus.com/inward/record.url?scp=0027687220&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0027687220&partnerID=8YFLogxK

M3 - Article

AN - SCOPUS:0027687220

SN - 1042-0967

VL - 76

SP - 1

EP - 9

JO - Electronics and Communications in Japan, Part III: Fundamental Electronic Science (English translation of Denshi Tsushin Gakkai Ronbunshi)

JF - Electronics and Communications in Japan, Part III: Fundamental Electronic Science (English translation of Denshi Tsushin Gakkai Ronbunshi)

IS - 11

ER -

Piezoelectric properties of ZnO films deposited by an ECR sputtering System

Abstract

ASJC Scopus subject areas

Other files and links

Fingerprint

Cite this