Piezoelectric micro energy harvesters employing advanced (Mg,Zr)-codoped AlN thin film

L. V. Minh, M. Hara, H. Kuwano, T. Yokoyama, T. Nishihara, M. Ueda

Research output: Contribution to journalConference articlepeer-review

3 Citations (Scopus)

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Physics & Astronomy

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Engineering & Materials Science