Piezoelectric endurance properties of lead zirconate titanate thick films for micro-device applications

Takashi Iijima; Yuji Kobayashi; Hiroshi Naganuma; Soichiro Okamura

doi:10.1080/00150190902987715

Piezoelectric endurance properties of lead zirconate titanate thick films for micro-device applications

Takashi Iijima, Yuji Kobayashi, Hiroshi Naganuma, Soichiro Okamura

Research output: Contribution to journal › Conference article › peer-review

1 Citation (Scopus)

Abstract

The effect of pulse switching on the piezoelectric response of 10-μm-thick Pb(Zr_0.53Ti_0.47)O₃ films was investigated. The amount of the longitudinal displacement related with piezoelectric response decreases when the bipolar pulse switching count is greater than 10⁷. This degradation tendency is consistent with the "fatigue" profile for remanent polarization of the PZT films. However, longitudinal displacement degradation was not observed for unipolar pulse switching. These experimental results suggest that the unipolar drive of the high electrical field does not affect the displacement endurance property of the PZT thick films for micro-actuator application.

Original language	English
Pages (from-to)	49-54
Number of pages	6
Journal	Ferroelectrics
Volume	389
Issue number	1 PART 1
DOIs	https://doi.org/10.1080/00150190902987715
Publication status	Published - 2009 Dec 1
Externally published	Yes

Keywords

Endurance property
Film
PZT
Piezoelectric displacement

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics

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10.1080/00150190902987715

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title = "Piezoelectric endurance properties of lead zirconate titanate thick films for micro-device applications",

abstract = "The effect of pulse switching on the piezoelectric response of 10-μm-thick Pb(Zr0.53Ti0.47)O3 films was investigated. The amount of the longitudinal displacement related with piezoelectric response decreases when the bipolar pulse switching count is greater than 107. This degradation tendency is consistent with the {"}fatigue{"} profile for remanent polarization of the PZT films. However, longitudinal displacement degradation was not observed for unipolar pulse switching. These experimental results suggest that the unipolar drive of the high electrical field does not affect the displacement endurance property of the PZT thick films for micro-actuator application.",

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AU - Iijima, Takashi

AU - Kobayashi, Yuji

AU - Naganuma, Hiroshi

AU - Okamura, Soichiro

PY - 2009/12/1

Y1 - 2009/12/1

N2 - The effect of pulse switching on the piezoelectric response of 10-μm-thick Pb(Zr0.53Ti0.47)O3 films was investigated. The amount of the longitudinal displacement related with piezoelectric response decreases when the bipolar pulse switching count is greater than 107. This degradation tendency is consistent with the "fatigue" profile for remanent polarization of the PZT films. However, longitudinal displacement degradation was not observed for unipolar pulse switching. These experimental results suggest that the unipolar drive of the high electrical field does not affect the displacement endurance property of the PZT thick films for micro-actuator application.

AB - The effect of pulse switching on the piezoelectric response of 10-μm-thick Pb(Zr0.53Ti0.47)O3 films was investigated. The amount of the longitudinal displacement related with piezoelectric response decreases when the bipolar pulse switching count is greater than 107. This degradation tendency is consistent with the "fatigue" profile for remanent polarization of the PZT films. However, longitudinal displacement degradation was not observed for unipolar pulse switching. These experimental results suggest that the unipolar drive of the high electrical field does not affect the displacement endurance property of the PZT thick films for micro-actuator application.

KW - Endurance property

KW - Film

KW - PZT

KW - Piezoelectric displacement

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