The effect of pulse switching on the piezoelectric response of 10-μm-thick Pb(Zr0.53Ti0.47)O3 films was investigated. The amount of the longitudinal displacement related with piezoelectric response decreases when the bipolar pulse switching count is greater than 107. This degradation tendency is consistent with the "fatigue" profile for remanent polarization of the PZT films. However, longitudinal displacement degradation was not observed for unipolar pulse switching. These experimental results suggest that the unipolar drive of the high electrical field does not affect the displacement endurance property of the PZT thick films for micro-actuator application.
- Endurance property
- Piezoelectric displacement
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics