Piezoelectric endurance properties of lead zirconate titanate thick films for micro-device applications

Takashi Iijima, Yuji Kobayashi, Hiroshi Naganuma, Soichiro Okamura

Research output: Contribution to journalConference articlepeer-review

1 Citation (Scopus)

Abstract

The effect of pulse switching on the piezoelectric response of 10-μm-thick Pb(Zr0.53Ti0.47)O3 films was investigated. The amount of the longitudinal displacement related with piezoelectric response decreases when the bipolar pulse switching count is greater than 107. This degradation tendency is consistent with the "fatigue" profile for remanent polarization of the PZT films. However, longitudinal displacement degradation was not observed for unipolar pulse switching. These experimental results suggest that the unipolar drive of the high electrical field does not affect the displacement endurance property of the PZT thick films for micro-actuator application.

Original languageEnglish
Pages (from-to)49-54
Number of pages6
JournalFerroelectrics
Volume389
Issue number1 PART 1
DOIs
Publication statusPublished - 2009
Externally publishedYes

Keywords

  • Endurance property
  • Film
  • PZT
  • Piezoelectric displacement

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

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