Piezoelectric characteristics of zno films deposited using an electron cyclotron resonance sputtering system

Michio Kadota, Toru Kasanami, Makoto Minakata

Research output: Contribution to journalArticlepeer-review

27 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Piezoelectric characteristics of zno films deposited using an electron cyclotron resonance sputtering system'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy